Beng Joo, Thung, Silterra Malaysia Sdn. Bhd. Kulim Hi-Tech Park, 09000 Kulim, Kedah, Malaysia, Malaysia

• Vol 8, No 5: May - August 2016 - Articles
  Challenges for 0.13µm Generation Shallow Trench Isolation on 0.18µm Equipment Platform
  Abstract  PDF